Genius
Online Quadrupole Mass Spectrometer
Genius is an online quadrupole mass spectrometer, which means it is designed to watch a process while the process is running rather than to analyse samples afterwards. A dual detector arrangement covers a wide dynamic range down to a detection limit below 100 ppb, dwell times from 1 ms make it fast enough to follow process transients, and an integrated turbomolecular pump keeps the whole instrument inside a 629 mm cabinet that can be installed next to the tool. Operation is from a 10 inch touchscreen running PV MassSpec, and Hakuto builds customised versions — inlet, gas handling and enclosure — around the application.
Specifications
- Analyser
- High-performance quadrupole mass spectrometer (QMS); molybdenum rod system, 6 mm diameter, 125 mm long
- Mass range
- 1–100, 1–200 or 1–300 amu
- Detection limit
- Below 100 ppb
- Ion source
- Electron impact
- Detectors
- Faraday cup and secondary electron multiplier (SEM)
- Mass resolution
- Adjustable, 0.5 to 2.5 u at 10% peak height
- Adjacent mass contribution
- Below 10, 20 or 50 ppm depending on mass range
- Dwell time and scan speed
- 1 ms to 16 s per u; up to 1000 readings per second per amu
- Sampling pressure
- 1.33 × 10⁻⁵ mbar to 30 psi
- Gas inlet
- Continuous sampling with two-stage pressure reduction, 1–2 sccm
- Gas connection
- Stainless steel; quartz capillary or 1/4 inch manual regulating valve optional
- Capillary temperature
- Up to 200 °C
- Vacuum system
- Integrated compact system with turbomolecular pump
- Electronics
- PrismaPro
- Software
- PV MassSpec, with data acquisition and quantitative analysis
- Operation
- 10 inch touchscreen; D-sub 15 pin communication connector, EtherCAT and Modbus for tool integration
- Dimensions
- 629 × 350 × 340 mm, 20–30 kg
- Power
- 220 V AC
Hakuto and its product names are trademarks of the manufacturer. Specifications on this page are reproduced from the manufacturer’s own published material and may change without notice; please confirm current details with us before ordering.